Design of a Capacitive based Closed-Loop Displacement Sensor: Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer

Ein praxisorientiertes Werk über die Konzeption eines kapazitiven MEMS‑Deformationsmessers mit Abmessungen unter einem Quadratmillimeter, der in ge ...
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Design of a Capacitive based Closed-Loop Displacement Sensor: Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer
Medimops DE
48.24 EUR
Preis aktualisiert am: 08-06-2026 00:09:21
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Design of a Capacitive based Closed-Loop Displacement Sensor, Fachbücher von Johan Schabbink
Galaxus.de
49.00 EUR
Preis aktualisiert am: 08-06-2026 07:47:27
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Johan Schabbink
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Johan Schabbink 9783659107948

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